氧化物La-Ca-Mn-O巨磁电阻薄膜的制备及其结构特性的研究

采用磁控溅射方法在ＺｒＯ２（００１）、Ｓｉ（００１）和玻璃衬底上成功地制备了ＬａＣａＭｎＯ（以下简称为ＬＣＭＯ）巨磁电阻薄膜。Ｘ－射线分析表明，ＺｒＯ２的晶格常数与ＬＣＭＯ的晶格常数失配虽然较大，仍可得到较好的ＬＣＭＯ薄膜。在Ｓｉ片上难以制备出致密完整的ＬＣＭＯ薄膜，其原因有待查明。玻璃衬底上可以获得纯相的ＬＣＭＯ巨磁电阻薄膜，在ＺｒＯ２衬底上制备的ＬＣＭＯ薄膜，其巨磁电阻效应在１５０Ｋ，３０００Ｇａｕｓ下达１３％左右。

PREPARATION AND XRD STUDIES OF La Ca Mn O THIN FILMS

La Ca Mn O (LCMO) thin films were prepared onto ZrO 2, Si and glass substrates by the magnetron sputtering method, and the powder target was used to grow the thin films during the deposition process After the deposition, the annealing heat treatment were made for the crystallization of the thin films Studies of x ray diffraction showed that the thin films on ZrO 2 and glass substrate were pure LCMO structure, but the thin films on Si substrate contained some MnO 2 phase It was hard to obtain the good quality of thin films on Si substrate, and the reason was not clearly understood The higher magnetoresistance of LCMO films on ZrO 2 substrate was obtained with the value of about 13% at the temperature of 150K and the magnetic field of 3500 Gauss