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XPS and TEM study of W-DLC/DLC double-layered film |
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| Authors: | Takanori Takeno Hiroyuki Miki Takashi Aoyama |
| Affiliation: | a Institute for International Advanced Interdisciplinary Research, Tohoku University International Advanced Research and Education Organization, 6-3 Aoba, Aramaki, Aoba-ku, Sendai 980-8578, Japan b Faculty of Systems Science and Technology, Akita Prefectural University, 84-4 Ebinokuchi, Tsuchiya, Yurihonjo 015-0055, Japan c Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan |
| Abstract: | A double-layered film of tungsten-containing diamond-like carbon (W-DLC) and DLC, (W-DLC)/DLC, was investigated. A film of 1.6 µm in thickness was deposited onto silicon substrate. The investigate double-layered coating was deposited by using the combination of PECVD and co-sputtering of tungsten metal target. Structure, interface and chemical bonding state of the investigated film were analyzed by Transmission electron microscope (TEM) and X-ray photoelectron spectroscopy (XPS). From the results of the analyses, the structure of double-layered film is that amorphous phase of carbon is continued from DLC to W-DLC and tungsten metal clusters are dispersed in W-DLC layer. |
| Keywords: | DLC Tungsten Double layer X-ray photoelectron spectroscopy Transmission electron microscope |
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