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Structural and magnetic properties of Co-N thin films synthesized by direct current magnetron sputtering
Authors:X. Wang  W.T. Zheng  Yan Chen
Affiliation:a Department of Materials Science, Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun, 130012, PR China
b School of Physics, Beihua University, Jilin, 132021, PR China
c State Key Laboratory of Inorganic Synthesis and Preparative Chemistry, College of Chemistry, Jilin University, Changchun, 130012, PR China
Abstract:Influence of nitrogen fractions [Nf = N2/(N2 + Ar)] and sputtering powers (Ps) on the structural and magnetic properties of Co-N thin films synthesized by direct current magnetron sputtering have been studied. With increasing Nf from 0 to 20%, a series of phases from β-Co, β-Co (N), Co4N to Co3N were obtained. However, when Nf was fixed at 10%, only Co4N phase with different Co contents in the films was prepared, whose values of saturation magnetism (Ms) increased from 12.9 ± 8.2 Am2/kg to 103.9 ± 6.1 Am2/kg with the increase of Ps. Interstitial nitrogen caused the decrease of coercivity from 24.12 kAm− 1 (for β-Co film) to 2.71 kAm− 1. However, the addition of interstitial nitrogen was not observed to increase the Ms of β-Co.
Keywords:Co-N   Nitrogen gas   Sputtering   Saturation magnetization   Coercivity
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