Fabrication of selective-emitter silicon heterojunction solar cells using hot-wire chemical vapor deposition and laser doping |
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| Authors: | BR Wu MS Wan RH Horng |
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| Affiliation: | a Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Taiwan, ROC
b Institute of Precision Engineering, National Chung Hsing University, National Chung Hsing University, Taichung 40227, Taiwan, ROC |
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| Abstract: | The Si heterojunction (HJ) solar cells were fabricated on the textured p-type mono-crystalline Si (c-Si) substrates using hot-wire chemical vapor deposition (HWCVD). In view of the potential for the bottom cell in a hybrid junction structure, the microcrystalline Si (μc-Si) film was used as the emitter with various PH3 dilution ratios. Prior to the n-μc-Si emitter deposition, a 5 nm-thick intrinsic amorphous Si layer (i-a-Si) was grown to passivate the c-Si surface. In order to improve the indium-tin oxide (ITO)/emitter front contact without using the higher PH3 doping concentration, a laser doping technique was employed to improve the ITO/n-μc-Si contact via the formation of the selective emitter structure. For a cell structure of Ag grid/ITO/n-μc-Si emitter/i-a-Si/textured p-c-Si/Al-electrode, the conversion efficiency (AM1.5) can be improved from 13.25% to 14.31% (cell area: 2 cm × 2 cm) via a suitable selective laser doping process. |
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| Keywords: | Selective emitter Silicon Heterojunction Solar cells Hot-wire chemical vapor deposition Laser doping |
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