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Laser annealing of Pb(Zr0.52Ti0.48)O3 thin films for the pyroelectric detectors |
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| Authors: | Xueyan Tian Yinzhu Li |
| Affiliation: | a Institute of Optoelectronics Technology, Beijing Jiaotong University, Beijing 100044, China b Key Laboratory of Luminescence and Optical Information (Beijing Jiaotong University), Ministry of Education, Beijing 100044, China c Kunming Institute of Physics, Kunming 650223, China |
| Abstract: | Lead zirconate titanate (Pb(Zr0.52Ti0.48)O3, PZT) thin films fabricated by magnetron sputtering technique on the Pt/Ti/SiO2/Si substrates at room temperature, were annealed by means of CO2 laser with resulting average substrate temperature below 500 °C. The crystal structure, surface morphology and pyroelectric properties of the PZT films before and after annealing were investigated by X-ray diffraction, atomic force microscopy, and pyroelectric measurements. The results show that the annealed PZT thin film with a laser energy density of 490 W/cm2 for 25 s has a typical perovskite phase, uniform crystalline particles with a size of about 90 nm, and a high pyroelectric coefficient with 1.15 × 10− 8 Ccm− 2 K− 1. |
| Keywords: | 81 10 Jt |
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