Separation of linear and non-linear imaging components in high-resolution transmission electron microscope images

Linear and non-linear image components in high-resolution transmission electron microscope images were successfully separated by applying a bandpass filter to the three-dimensional Fourier spectrum of its through-focus series of images. In the observed lattice image of a wedgeshaped Si [110] crystal, we determined the magnitude of the contribution of the non-linear imaging components to the total image intensity distribution. The contribution was proved to become sometimes larger than that of the linear imaging component, even at a thickness of 13 nm.