芯片焊接机光学探头的设计及标定

为了在一个视场同时看到处于准焊接位置的电子芯片和基板上的标记是否对准,以及芯片和基板是否平行,设计并标定了提供对准成像功能和准直检平功能的光学探头,包括对目标的照明系统。保证了芯片焊接的准确性。

Design and calibration on optical probe used in chip-pedestal welding machine

In order to show in one viewing field their alignment condition of marks on both chip and pedestal which are in pre-welding position before welded together,also to show whether chip and pedestal are in parallel condition,we design and calibrate this optical probe which can perform the alignment imaging function and autocollimating function,as well as illuminating function for them.The probe had greatly improved the accuracy for chip welding.