| 用斐索自聚焦光纤干涉仪测微区面形 |
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| 引用本文： | 孙晓红,明海,白明,张国平,吴云霞,刘旸,梁忠诚,谢建平,束继祖. 用斐索自聚焦光纤干涉仪测微区面形[J]. 中国激光, 1999, 26(10): 907-911 |
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| 作者姓名： | 孙晓红 明海 白明 张国平 吴云霞 刘旸 梁忠诚 谢建平 束继祖 |
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| 作者单位： | 1. 中国科技大学物理系,合肥,230026
2. 中国科学院国家微重力实验室,北京,100084 |
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| 摘 要： | 采用LD泵浦的单纵模Nd：YVO4倍频激光器、自聚焦棒以及三维精密调整架构成斐索型干涉仪，它具有同时测量微区振动和面形的功能，着重给出了测量微区面形的实验结果和理论分析。
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| 关 键 词： | 斐索干涉仪 自聚焦棒 光纤传感器 |
| 收稿时间： | 1998-03-30 |
A GRIN Fizeau Interferometer for the Profile Measurement of Micro-surfaces |
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| Sun Xiaohong,Ming Hai,Bai Ming,Zhang Guoping,Wu Yunxia,Liu Yang,Liang Zhongcheng,Xie Jianping,Shu Jizu. A GRIN Fizeau Interferometer for the Profile Measurement of Micro-surfaces[J]. Chinese Journal of Lasers, 1999, 26(10): 907-911 |
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| Authors: | Sun Xiaohong Ming Hai Bai Ming Zhang Guoping Wu Yunxia Liu Yang Liang Zhongcheng Xie Jianping Shu Jizu |
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| Abstract: | A Fizeau type interferometer reported here is composed of a LD-pumped singlemode double-frequency Nd: YVO4 laser, a different-size GRIN (Gradient Index) rod lens and a 3-D fine regulation stand. It is used for the measurement of the profile, deformation and oscillatory feature of micro- surfaces simultaneously. The experimental results and theoretical analysis are given. |
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| Keywords: | Fizeau interferometer GRIN fiber sensor |
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