| 硬质合金高温化学气相沉积TiC涂层工艺研究 |
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| 引用本文： | &#,&#,&#,&#,&#,&#,&#,&#,&#,&#,&#,&#,&#,&#. 硬质合金高温化学气相沉积TiC涂层工艺研究[J]. 西华大学学报(自然科学版), 2015, 34(4): 97-101. DOI: 10.3969/j.issn.1673-159X.2015.04.020 |
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| 作者姓名： | &# &# &# &# &# &# &# &# &# &# &# &# &# &# |
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| 作者单位： | 1.西华大学材料科学与工程学院 |
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| 摘 要： | 采用高温化学气相沉积在YG8基体上制备TiC涂层, 研究沉积温度、沉积时间、H2流量、H2/CH4(流量比)以及TiCl4流量对镀层的抗弯曲强度、膜基结合力及表面显微硬度的影响, 并通过正交试验优化工艺参数。结果表明:当沉积温度为1 000℃, 沉积时间为90 min, H2流量为400 ml, H2/CH4(流量比)为15:1, TiCl4流量为80 mL时, 镀层具有优良的性能, 抗弯曲强度达到1 100 N, 表面显微硬度达到3 228 HV, 膜基结合力达到90 N。
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| 关 键 词： | 碳化钛 化学气相沉积 硬质合金 |
Research of TiC Coatings on Cemented Carbide by HT-CVD |
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| ZHANG Li-zhen,ZHAO Guang-bin,LUO Lei,AN Xiao-jian,CHEN Zhi-xiong. Research of TiC Coatings on Cemented Carbide by HT-CVD[J]. Journal of Xihua University(Natural Science Edition), 2015, 34(4): 97-101. DOI: 10.3969/j.issn.1673-159X.2015.04.020 |
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| Authors: | ZHANG Li-zhen ZHAO Guang-bin LUO Lei AN Xiao-jian CHEN Zhi-xiong |
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| Abstract: | TiC composite coating were prepared on the YG8 substrate with high temperature chemical vapor deposition (HT-CVD) method.Effects of temperature and time, and the flow of H2, H2/CH4 and Ticl4 on the bending strength, strength and microhardness of film, and on the bonding strength of thin film-matrix were investigated.The depositing parameters were optimized through orthogonal test.The results indicate that fine composite coating can be these:deposited at 1000℃ for 90 min, and with the flow of H2 is 400ml, the H2/CH4 is 15:1, the flow of TiCl4 is 80ml, its bending strength is 1100N, its microhardness is 3228HV, the bonding strength of thin film-matrix is 90N. |
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