Determining thin film parameters by prism coupling technique |
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| Authors: | A V Khomchenko A B Sotsky A A Romanenko E V Glazunov D N Kostyuchenko |
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| Affiliation: | (1) Institute of Applied Optics, National Academy of Sciences of Belarus, Mogilev, Belarus |
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| Abstract: | A new method for determining the absorption coefficients, refractive indices, and thicknesses of thin films is proposed. The method is based on the measurement of the angular dependence of the energy reflection coefficient of a light beam upon excitation of the waveguide or leaky modes by a prism coupler. The features of determination of the parameters of SiOx films on silicon and glass substrates are considered. |
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