单频激光干涉仪条纹的偏振移相细分技术

提出了一种用于单频激光干涉仪条纹细分的偏振移相技术.通过偏振分光镜、波片等光学元器件产生四路依次相差90°相位的激光干涉信号,经过硬件电路的整形、放大和比较后,可以解决常见的光强"零漂"问题.共光路设计有效地消除了由于环境因素给测量带来的误差,提高了干涉系统的稳定性和重复性.移相技术不仅充分地利用光能量,而且四路信号更便于干涉条纹的计数和判向,同时为电子细分技术奠定了基础.

The Polarization Phase-shifting Technology for Single-frequency Laser Interferometer Fringes Subdivision

The polarization phase-shifting technology is put forward for the single-frequency laser interferometer fringes subdivision. Four laser interferometer signals which phase-difference followed by 90°can be obtained with the optical components. The "zero drift" problem of the light intensity can be solved by hardware circuit. The common optical path arrangement can effectively remove the error caused by environmental factors and increase the stability and repeatability of the interferometer system. Phase-shifting technology can not only fully use the light intensity, but also the four laser interferometer signals are easy to take count and distinguish the direction of the laser interferometer fringes. And this technology laid the foundation for further electronic subdivision.