| Fe2O3/SnO2和SnO2/Fe2O3双层薄膜的XPS分析 |
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| 引用本文： | 娄向东 沈荷生 沈瑜生. Fe2O3/SnO2和SnO2/Fe2O3双层薄膜的XPS分析[J]. 传感技术学报, 1992, 5(3): 17-22 |
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| 作者姓名： | 娄向东 沈荷生 沈瑜生 |
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| 作者单位： | 中国科学技术大学材料科学与工程系(娄向东，沈荷生)，中国科学技术大学材料科学与工程系(沈瑜生) |
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| 摘 要： | 用X光光电子能谱(XPS),结合Ar~+刻蚀对Fe_2O_3/SnO_2及Fe_20_3/SnO_2双层薄膜进行分析.结果表明:Fe_2O_3/SnO_2膜表面,晶格氧的结合能为529.85eV,热处理前有大量吸附氧存在,在600℃退火后,大部分羟基、羰基形态的吸附氧解吸;SnO_2/Fe_2O_3膜表面,热处理前后都只有少量的吸附氧,经热处理后表面吸附氧却略有增加.双层薄膜中锡向氧化铁层的扩散较铁向氧化锡层的扩散强.扩散的结果,形成了一个数十纳米的过渡层,对元件的气敏性质产生一定的影响.
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| 关 键 词： | XPS分析 SnO2 Fe2O3 薄膜 |
XPS Study on Fe_2O_3/Sno_2 and SnO_2/Fe_2O_3 Biiayer Thin Films |
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| Lou Xiangdong Shen Hesheng Shen Yusheng. XPS Study on Fe_2O_3/Sno_2 and SnO_2/Fe_2O_3 Biiayer Thin Films[J]. Journal of Transduction Technology, 1992, 5(3): 17-22 |
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| Authors: | Lou Xiangdong Shen Hesheng Shen Yusheng |
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| Abstract: | The surface and interface of Fe2O3/SnO2 and SnO2/Fe2O3 bilayers has been studied by X-ray photoelectron spectroscopy (XPS) combined with argonion sputtering. There are a lot of adsorbed oxygen on the surface of unannealed Fe2O3/SnO2 bilayer and a few adsorbed oxygen left on the surface after annealing. On the surface of SnO2/Fe2O3 bilayer only a little amount of oxygen atoms were absorbed with and without annealing. The diffusion of Sn atoms to Fe2O3 layer was faster than that of Fe atoms to SnO2 layer. An about 10-8 m thick transition layer was formed with the diffusion between Sn and Fe sublayers and affected on the metal oxide bilayer gas sensing properties. |
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| Keywords: | SnO2 Fe2O3 thin film XPS |
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