Vibration analysis of a circular thin polymeric piezoelectric diaphragm with fluid interaction

This paper presents vibration analysis of a circular piezoelectric micro-plate in fluidic environment. PVDF film is used as the piezoelectric material. PVDF is a material with asymmetric matrix of piezoelectric constants and shows different piezoelectric properties in different directions. The governing equations, which are more complicated compared to piezo-ceramics, are derived. The boundary conditions for the plate are assumed fully clamped at outer edge, as is the case in many micro devices. Liquid is modeled as a damping foundation under the plate. The equations of motion are solved using generalized differential quadrature method to obtain Eigen frequencies and mode shapes of the plate. The results are compared by developed finite element analysis.