| 微间隙击穿性能的研究 |
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| 引用本文： | 吴冲基 樊玉薇. 微间隙击穿性能的研究[J]. 真空电子技术, 1993, 0(2): 1-5 |
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| 作者姓名： | 吴冲基 樊玉薇 |
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| 作者单位： | 东南大学电子工程系 南京210018 |
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| 摘 要： | 本文对微米量级微间隙的电击穿性能进行了研究,在制作出微间隙试样的基础上,改变微间隙所处环境气氛以及间隙距离,测试了不同条件下的击穿电压V相对于气体压强P关系曲线,系统研究了N_2、O_2、Ar、He、Ne等环境气氛以及间隙距离对微间隙击穿性能的影响。对微间隙的静电击穿机制也进行了一些有益的探讨。
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| 关 键 词： | 微间隙 电击穿性能 电击穿机制 |
A Study on Gas Discharge Properties in Micro-gaps |
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| Wu Chongruo Fan Yuwei. A Study on Gas Discharge Properties in Micro-gaps[J]. Vacuum Electronics, 1993, 0(2): 1-5 |
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| Authors: | Wu Chongruo Fan Yuwei |
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| Abstract: | Several kinds of micro-gap specimens are prepared to simulate the gas discharge properties of micro-gap between stator and rotor of static electrical micromotor. The discharge voltages of various micro-gap of different distances and ambiences (N_2, O_2, Ar, He, Ne gases) are studied with changing the gas presure, It is found out that the gap ambiences and distances have a great effect on the gas discharge voltages. The mechanism of gas discharge in micro-gap are proposed as well. |
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| Keywords: | micro-gap gas discharge property mechanism of gas discharge |
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