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Ti-O薄膜中O含量对紫外光-可见光吸收的影响
引用本文:万维威,何翔,孙奉娄.Ti-O薄膜中O含量对紫外光-可见光吸收的影响[J].表面技术,2010,39(1):45-47.
作者姓名:万维威  何翔  孙奉娄
作者单位:中南民族大学,武汉,430074;中南民族大学,武汉,430074;中南民族大学,武汉,430074
基金项目:武汉市重点科技攻关计划项目(200761023420)
摘    要:应用射频磁控溅射技术在普通载玻片上镀制一层均匀的Ti-O薄膜,采用红外光谱仪对其进行红外吸收光谱分析,采用紫外光-可见光分光光度计测量其吸光度,得到了在不同O含量条件下制备的Ti-O薄膜对紫外光-可见光的吸收情况,并进行了比较。实验结果表明:随着O含量的逐渐减少,Ti-O薄膜的结构从TiO2逐渐转变为多种Ti-O结构共存,并且其吸收峰出现红移现象。

关 键 词:Ti-O薄膜  射频磁控溅射  禁带宽度  红移
收稿时间:2009/10/28 0:00:00
修稿时间:2010/2/10 0:00:00

Absorption UV and Visible Spectrum of Ti-O Films Affected by O Content
WAN Wei-wei,HE Xiang and SUN Feng-lou.Absorption UV and Visible Spectrum of Ti-O Films Affected by O Content[J].Surface Technology,2010,39(1):45-47.
Authors:WAN Wei-wei  HE Xiang and SUN Feng-lou
Affiliation:South-central University for Nationalities;Wuhan 430074;China
Abstract:The Ti-O films were coated on common glasses by RF magnetron sputtering technique.The absorption infrared spectrums of the Ti-O films were analyzed by infrared spectrometer.The absorbances of the Ti-O films were measured by uv-vis spectrophotometer,so we obtained and compared the absorption UV and visible spectrum of the Ti-O films with different oxygen content.The experiment results show that while the oxygen content decreases the compositions of the films are changed from TiO2 to different structures of T...
Keywords:Ti-O films  RF magnetron  Band gap  Red-shifted  
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