纳米氧化铝有序多孔膜制备工艺研究

为了获得大面积有序孔排列以及不同孔径的氧化铝膜,采用二次阳极氧化法可制备大面积有序铝阳极氧化多孔(AAO)膜,着重研究氧化电压、氧化时间、电解液浓度以及扩孔时间对AAO膜孔径大小、膜层厚度和形貌结构的影响,用X射线粉末衍射(XRD)仪进行物相分析,利用扫描电子显微镜(SEM)表征多孔膜的形貌.结果表明,在700 ℃以下条件下AAO膜以无定形态存在,经800 ℃退火后无定形氧化铝转化为γ-Al2O3,多孔膜随电压和电解液浓度增加而增大,经H3PO4溶液扩孔后可获得较大孔径模板,扩孔时间与孔径变化呈近似线性关系.为满足应用需求的AAO膜的制备提供了依据.

Study of the Preparation Technology for Orderly and Porous Nanometer Alumina Film

Large area anodic aluminum oxide (AAO) film with highly ordered pores was prepared using a two step anodizing technique. Thus the effects of process parameters such as anodizing voltage, anodizing duration, bath concentration, and pore enlargement duration on the pore size, thickness, and appearance of the AAO film were investigated. And the AAO film was characterized by means of scanning electron microscopy and X ray diffraction. It was found that the anodizing voltage had the most significant effect on the size of the pores, while the thickness of the AAO film was largely determined by the anodizing duration. It was suggested to prepare a thick AAO film of good uniformity and desired patterns and size of the pores at a high anodizing voltage, low temperature, and extended anodizing duration.