非线性激光制造的进展与应用（特邀）

超快激光是指脉冲宽度极窄的激光，其瞬时功率极高，与物质之间的相互作用呈现出非线性、非平衡、多尺度的状态。超快激光具有超快（脉冲持续时间短）、超强（瞬时功率高）、超精细（加工结构精细）等特点，由此实现的非线性激光制造技术可以打破传统微纳制造的局限，实现各类难加工材料和复杂微纳结构的超精细制造，精度可达亚微米至纳米量级，在微光学、生物医学、智能电子器件等前沿领域体现出了独特的应用价值。文中主要聚焦飞秒激光微纳加工技术前沿，简要概括了飞秒激光加工的特点；介绍了飞秒激光加工的主要技术手段，包括飞秒激光直写和飞秒激光并行加工；讨论了飞秒激光加工技术的前沿应用领域，如微纳光学器件、微流体器件、多功能结构化表面、生物医学工程等；最后，对飞秒激光加工制造技术未来的发展趋势和研究方向进行展望。

Progress and application of nonlinear laser manufacturing (Invited)

Ultrafast lasers refer to lasers with very narrow widths. Ultrafast laser has extremely high instantaneous power, and its interaction with matter presents a non-linear, nonequilibrium and multi-scale state. With the unique characteristics of ultrafast(short pulse duration), ultrahigh (high instantaneous power) and ultrafine (fine processing structure), the realized nonlinear laser manufacturing technology can break the limitations of traditional micro-nano manufacturing and realize the ultrafine processing of various difficult-to-machine materials and complex micronano structures. It demonstrates unique application value in frontier fields such as microoptics, biomedicine, and intelligent electronic devices with precision ranging from sub-micron to nanoscale. The frontiers of femtosecond laser micro/nano machining technology was focused on. Firstly, the processing characteristics of femtosecond laser technology and the main processing methods were introduced, including femtosecond laser direct writing and femtosecond laser parallel processing. Then, the frontier application fields of femtosecond laser processing technology were discussed, such as micro-nano optical devices, microfluidic devices, multifunctional structured surfaces and biomedical engineering. Finally, the future development trend and research direction of femtosecond laser processing technology were prospected.