LTCC模块表面线条的精细化加工

LTCC作为一种优异的加工方式,是实现小型化、高频化的有力手段。结合LTCC模块小型化,特别是表面线条精细化的要求,综述了LTCC模块表面线条精细加工的四种方法:表面薄膜加工技术、厚膜光刻加工技术、精密丝网印刷技术、Inkjet浆料直写技术。总结了各种方法的适用范围、发展概况和趋势。

Refi ned Manufacturing of Surface Fine Line on LTCC Module

As one of the most convenient manufacturing methods, LTCC is a powerful way to achieve the demand of miniaturization and high frequency to electronic modules. Combined with the miniaturization of LTCC module, especially for the refined manufacturing of surface fine line, four different manufacturing methods, including thin film technique, thin film lithography technique, fine line screen printing technique and inkjet direct writing technique have been overviewed. Furthermore, the application, development and tendency are summarized.