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基于EWOD的锥形管状结构液体变焦透镜
引用本文:康明,岳瑞峰,吴建刚,欧阳帆,刘理天.基于EWOD的锥形管状结构液体变焦透镜[J].传感技术学报,2006,19(5):1768-1770.
作者姓名:康明  岳瑞峰  吴建刚  欧阳帆  刘理天
作者单位:清华大学微电子学研究所,北京,100084
基金项目:国家自然科学基金资助项目(10472055)
摘    要:提出了一种基于介质上电润湿(EWOD)的液体变焦透镜的新结构.它由一个依次覆盖有ITO透明导电薄膜及疏水介质膜的下极板、悬在其上的一个内外壁均覆盖有疏水层的玻璃锥管以及处于两者之间的导电液滴组成.通过改变ITO与液滴之间的电压大小,透镜的曲率及位置能同时被调节,从而实现对透镜焦距的调节.实验结果表明,该器件在0~50 V电压下可实现对2 cm至无穷远处物体的聚焦.

关 键 词:介质上电润湿  变焦  液体透镜  表面张力
文章编号:1004-1699(2006)05-1768-03
修稿时间:2006年7月1日

Conical Tube Employed Variable-focus Liquid Lens Based on EWOD
KANG Ming,YUE Rui-Feng,WU Jian-Gang,OU Yang-fan,LIU Li-Tian.Conical Tube Employed Variable-focus Liquid Lens Based on EWOD[J].Journal of Transduction Technology,2006,19(5):1768-1770.
Authors:KANG Ming  YUE Rui-Feng  WU Jian-Gang  OU Yang-fan  LIU Li-Tian
Affiliation:Institute of Microelectronics, Tsinghua University, Beijing 100084, China
Abstract:A novel self-centered variable focus liquid lens based on electrowetting-on-dielectric (EWOD) is presented, which consists of a glass plate coated with two transparent layers of conductive ITO film and hydrophobic dielectric film, a conical tube partly covered with hydrophobic film positioned with a gap above the glass plate and a water droplet. By changing the voltage applied to the droplet and the ITO control electrode, both the position and curvature of the meniscus between the two immiscible fluids can be reversibly adjusted, thus realizing a lens of variable focal length. The experimental results show that the prototype of the liquid lens with 50 V power supply is able to focus on objects from 2 centimeters up to infinity away with good imaging quality.
Keywords:electrowetting on dielectric  variable focus  liquid lens  surface tension
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