In situ study of the initial stages of diamond deposition on 3C–SiC (100) surfaces: Towards the mechanisms of diamond nucleation |
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Affiliation: | 1. CEA DSM-DRECAM-SPCSI, 91191 Gif sur Yvette, France;2. CEA DRT-LIST-DETECS, 91191 Gif sur Yvette, France;3. Dipertimento di Scienze e Tecnologie Chimiche, Università di Roma “Tor Vergata”, Via della Ricerca Scientifica, 00133 Rome, Italy |
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Abstract: | The mechanisms involved in the diamond nucleation on 3C–SiC surfaces have been investigated using a sequential in situ approach using electron spectroscopies (XPS, XAES and ELS). Moreover, diamond crystals have been studied by HRSEM. The in situ nucleation treatment allows a high diamond nucleation density close to 4 × 1010 cm? 2. During the in situ enhanced nucleation treatment under plasma, a negative bias was applied to the sample. The formation of an amorphous carbon phase and the roughening of the 3C–SiC surface have been observed. The part of these competing mechanisms in diamond nucleation is discussed. |
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