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Hot filament CVD diamond coating of TiC sliders
Affiliation:1. Innovation Plaza Miyagi, Japan Science and Technology Agency, 6-6-5 Minami-Yoshinari, Aoba-ku, Sendai 989-3204, Japan;2. Institute of Fluid Science, Tohoku University, Katahira 2-1-1, Aoba-Ku, Sendai 980-8577, Japan
Abstract:Hot filament chemical vapour deposition (HF CVD) process with low filament temperature (∼ 1650 °C) was utilized for the diamond coating of TiC samples. Porous substrates were fabricated by pulse discharge sintering (PDS) to create more nucleation sites. Nucleation density and morphology of deposited diamond films were studied using scanning electron microscopy (SEM). It was found that the highest growth rate occurs at substrate temperature of 980 °C. Evaluation of the residual stress in deposited films was carried out by Raman spectroscopy. Ball on disk tests were performed with steel as a counterface material. After polishing diamond films demonstrated good sliding performance: friction coefficient of 0.08 and wear rate of 10 17 m3/N m.
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