| Si-MOS电容式微型湿度传感器的研究 |
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| 引用本文： | 骆如访 罗桂昌 陆玉萍 俨荣巩. Si-MOS电容式微型湿度传感器的研究[J]. 传感技术学报, 1990, 3(3) |
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| 作者姓名： | 骆如访 罗桂昌 陆玉萍 俨荣巩 |
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| 作者单位： | 中国科学院上海冶金研究所(骆如枋，罗桂昌，陆玉萍)，中国科学院上海冶金研究所(严荣华) |
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| 摘 要： | Si—MOS电容式湿度传感器是利用IC技术制作的微型绝对湿度传感器,它体积小、灵敏度高、化学稳定性好,特别适用于IC及微电子器件气密封装内的湿度检测和永久性气体中微量水份的连续监测.文章叙述了传感器的结构、原理、性能及有关应用,并对其灵敏度、响应速度及贮存等问题进行了讨论.
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| 关 键 词： | 湿度传感器 露点 多孔Al_2O_3 |
Study of the Si-MOS Capacitive Type Micro Humidity Sensor |
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| Luo Rufang Lou Guichang LuYuping and Yian Ronhua. Study of the Si-MOS Capacitive Type Micro Humidity Sensor[J]. Journal of Transduction Technology, 1990, 3(3) |
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| Authors: | Luo Rufang Lou Guichang LuYuping and Yian Ronhua |
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| Abstract: | A Si-MOS capacitive type micro absolute humidity sensor manufactured by IC technology was developed. The sensor is possessed of the minimized size, the high sensitivity and the chemi-stability. It could be used to examine the reliablity of sealing packages of electronic devices particularly and to detect dew point of the permanent gases. The structure, performances and applications of the sensor were discribed. The sensitivity and response time were discussed. |
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| Keywords: | humidity sensor dewpoint porous Al2O3 ceramica |
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