Synthesis of highly-ordered TiO2 nanotubes for a hydrogen sensor

Highly-ordered, vertically oriented TiO₂ nanotubes are synthesized, and their hydrogen sensing properties are investigated. Self-organized TiO₂ nanotube arrays are grown by anodic oxidation of a titanium foil in an aqueous solution that contains 1 wt% hydrofluoric acid at 20 °C. We use a potential ramp at a rate of 100 mV s⁻¹, increasing from the initial open-circuit potential (OCP) to 20 V, and this final potential of 20 V is then held constant during the anodization process. The fabricated TiO₂ nanotubes are approximately 1 μm in length and 90 nm in diameter. For the sensor measurements, two platinum pads are used as electrodes on the TiO₂ nanotube arrays. The hydrogen sensing characteristics of the sensor are analyzed by measuring the sensor responses ((I − I₀)/I₀) in the temperature interval of 20–150 °C. We find that the sensitivity of the sensor is approximately 20 for 1000 ppm H₂ exposure at room temperature, and increases with increasing temperature. The sensing mechanism of the TiO₂ nanotube sensor could be explained with chemisorption of H₂ on the highly active nanotube surface.