飞秒脉冲激光沉积类金刚石膜实验研究

期望用类金刚石膜作为硅的红外保护/增透膜,采用波长为800nm,脉宽50fs,重复频率1KH z的T i:Sapph ire飞秒激光器及石墨靶材在单晶S i片上沉积了约0.7μm~1μm厚的类金刚石膜(d iam ond-like carbon film s,DLC),获得了光滑致密,硬度显著提高,红外透过率有一定增加的样品。通过对薄膜拉曼光谱和X射线光电子能谱等的测试,发现单脉冲能量在0.4m J~1.6m J范围内变动时,单脉冲能量0.8m J获得的类金刚石膜综合性能最佳,其对应的焦斑功率密度计算值为1.4×1014W/cm2。

Experimental research of pulse laser deposition of diamond-like carbon films by femtosecond laser

In order to utilize diamond-like caron films(DLC) as protective and anti-reflection films for Si,a Ti: Sapphire laser of 800nm wavelength,50fs pulse width,1kHz and graphite target are used to deposit DLC 0.7μm～1μm thickness of on Si slice.Slippery,compact films samples are made and their hardness improve significantly,their transimittance in IR also improve.When single laser pulse energy changes between 0.4mJ and 1.6mJ,overall performance of diamond-like carbon films deposited under the condition of single laser pulse energy equals 0.8mJ rank the first,the corresponding laser fluence is 1.4×10~(14)W/cm~2 by calculating.Raman spectrum and X-ray Photoelectron Spectroscopy of DLC films are measured.