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超光滑表面纳米压痕硬度测试研究
引用本文:贾世奎,李成贵,刘春红. 超光滑表面纳米压痕硬度测试研究[J]. 工业计量, 2008, 18(2): 3-5
作者姓名:贾世奎  李成贵  刘春红
作者单位:北京航空航天大学仪器科学与光电工程学院,北京,100083;北京航空航天大学仪器科学与光电工程学院,北京,100083;北京航空航天大学仪器科学与光电工程学院,北京,100083
摘    要:介绍纳米压痕法常用的Oliver-Pharr方法的计算原理,对硬度的概念做了进一步讨论。通过对三种不同材料的超光滑表面进行硬度测试,得出它们各自的硬度值和弹性模量,分析了结果差异的原因,探讨了在采用Oliver-Pharr方法进行硬度各参数测量时应注意的问题,分析结果对超光滑表面加工也有一定的指导意义。

关 键 词:纳米压痕  纳米硬度  超光滑表面  Oliver-Pharr方法
文章编号:1002-1183(2008)02-0003-03
收稿时间:2007-09-11
修稿时间:2007-09-11

Research on Nano-hardness Testing of Super Smooth Surface
JIA Shi-kui,LI Cheng-gui,LIU Chun-hong. Research on Nano-hardness Testing of Super Smooth Surface[J]. Industrial Measurement, 2008, 18(2): 3-5
Authors:JIA Shi-kui  LI Cheng-gui  LIU Chun-hong
Affiliation:( School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China)
Abstract:The Oliver-Pharr method, one of the most useful calculating methods of nano-indentation, is introduced. Concept of hardness is discussed also. Nano-hardness Values and elastic modulus of three workpieces were determined through experiments, and differences of the results were analyzed. Some suggestions are given when hardness value is tested with Oliver-Pharr method. Analysis results has directive significance for manufacturing of super smooth surface.
Keywords:nano-indentation    nano-hardness   super smooth surface   Oliver-Pharr method
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