| Love波传感器及其质量灵敏度测试 |
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| 引用本文： | 胡友旺,史建亮,贾宏光,吴一辉. Love波传感器及其质量灵敏度测试[J]. 传感技术学报, 2006, 19(5): 2126-2129 |
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| 作者姓名： | 胡友旺 史建亮 贾宏光 吴一辉 |
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| 作者单位： | 1. 中国科学院,长春光学精密机械与物理研究所,应用光学国家重点实验室,吉林,长春,130033;中国科学院,研究生院,北京,100039
2. 中国科学院,长春光学精密机械与物理研究所,应用光学国家重点实验室,吉林,长春,130033 |
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| 摘 要： | 为实现流体领域的液相传感,设计并制作了基于36°-YX LiTaO3作为压电衬底、PMMA薄膜作为波导层的Love波传感器;通过微电流电铸实验测量得到Love波传感器的质量灵敏度为-2.281 g-1cm2.分析了波导层厚度、器件温度和电铸电极的厚度三个因素对灵敏度的影响,为进一步提高灵敏度提供了参考.
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| 关 键 词： | Love波传感器 LiTaO3 PMMA 灵敏度 |
| 文章编号： | 1004-1699(2006)05-2126-04 |
| 修稿时间： | 2006-07-01 |
Love Wave Sensor and the Measurement of Mass Sensitivity |
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| HU You-wang,SHI Jian-liang,JIA Hong-guang,WU Yi-hui. Love Wave Sensor and the Measurement of Mass Sensitivity[J]. Journal of Transduction Technology, 2006, 19(5): 2126-2129 |
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| Authors: | HU You-wang SHI Jian-liang JIA Hong-guang WU Yi-hui |
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| Affiliation: | 1.The State Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; 2.Postgraduate Institute of Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | For liquid sensing applications in fluid field, Love wave sensors were designed and fabricated on 36o-YX LiTaO3 substrate with PMMA thin film guiding layer. The mass sensitivities of Love wave sensors were measured by electroplating experiment with stable current. The mass sensitivity measures 2.281g-1cm2. For the farther improvement of sensitivity, the impacts to mass sensitivity of ingredients were analyzed, such as thickness of guiding layer, device temperature and thickness of electroforming cathode. |
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| Keywords: | LiTaO3 PMMA |
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