机电耦合中微开关悬臂梁的瞬态分析

在微机电开关梁的设计过程中,对其吸合过程的响应时间的分析具有重要的意义。对静电力驱动的微开关梁的瞬态分析用于确定设计中的结构或机器部件的响应时间是必要的。运用ANSYS软件对微梁模型进行机电耦合分析,采用Trans126换能器单元的直接耦合静电—结构分析模型,分析了微梁的瞬态特性,得出微梁的吸合时间随着厚度的增大而增大。

Transient Test for MEMS Switch of Cantilever Beam Under Electrostatic-mechanical Coupling

In the design process of the MEMS switch beam,the analysis of the pull-in time has important significance.In order to design the pull-in time of the MEMS devices,the analysis of the transient on the electric-powered micro-beam is necessary.Based on the direct coupling method to analyze the coupling of mechanical and electrical coupling beam,Using ANSYS software to create the model of the micro-beam to analysis the electrostatic-mechanical coupling,using Trans126 transducer element create analysis model building,analyze of micro beam transient characteristics,obtaining that the pull-in time of the micro-beam as the thickness increases.