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Synergism in sputtering of copper nanoclusters on graphite substrate at low energy Cu2 bombardment
Authors:GV Kornich  G BetzVG Kornich  VI ShulgaOA Yermolenko
Affiliation:a Zaporozhye National Technical University, 64 Jhukovski Str., 69063 Zaporozhye, Ukraine
b Institut für Angewandte Physik, Technische Universität Wien, Wiedner Hauptstr. 8-10, A-1040 Wien, Austria
c Saint-Petersburg State University, 7-9 Universitetskaya nab., 199034 Saint-Petersburg, Russia
d Institute of Nuclear Physics, Moscow State University, Leninskie gory, 119991 Moscow, Russia
Abstract:Molecular dynamics simulation of Cu cluster sputtering by 50-200 eV/atom Cu2 dimers and Cu single atoms has been performed. The clusters were located on a (0 0 0 1) graphite surface and consisted of 13-195 atoms. Synergy features were identified in the sputtering yield and energy distributions of sputtered particles calculated for the cases of cluster bombardment with Cu dimers and monomers at the same velocity. The reason for the nonlinear effects in surface cluster sputtering is the overlapping of collision cascades generated by each of the dimer atoms.
Keywords:Cluster sputtering  Collision cascades  Synergism  Molecular dynamics
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