| 类金刚石膜中应力释放花样形貌分析 |
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| 引用本文： | 程宇航,吴一平,陈建国,乔学亮,谢长生. 类金刚石膜中应力释放花样形貌分析[J]. 真空科学与技术学报, 1998, 18(1): 58-62 |
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| 作者姓名： | 程宇航 吴一平 陈建国 乔学亮 谢长生 |
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| 作者单位： | 华中理工大学材料系,武汉,430074 |
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| 基金项目： | 华中理工大学塑性成型模拟及模具技术国家重点实验室资助 |
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| 摘 要： | 用IRaman谱研究了射频-直流等离子体化学气相沉积法制备的类金刚石膜结构，用弯曲法研究了类金刚石膜的应力，用光学显微镜对类金刚石膜中由于压应力的释放所形成的花样形貌进行了观察。类金刚石膜中存在1～4．7GPa的压应力。由于应力释放，在膜-基界面处观察到正弦曲线状、分枝状、直线状和花状花样外，还观察到时钟状和水泡状两种新型应力释放花样，用薄板起皱理论可以很好地解释这两种新花样。
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| 关 键 词： | 类金刚石 薄膜 内应力 起皱花样 |
| 修稿时间： | 1996-07-30 |
Topography of the Stress Released on the Surfaces of the Diamond-like Carbon Films |
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| CHEN Yuhang,Wu Yiping,Chen Jianguo,Qiao Xueliang,Xie changsheng. Topography of the Stress Released on the Surfaces of the Diamond-like Carbon Films[J]. JOurnal of Vacuum Science and Technology, 1998, 18(1): 58-62 |
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| Authors: | CHEN Yuhang Wu Yiping Chen Jianguo Qiao Xueliang Xie changsheng |
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| Abstract: | Diamond like carban films are prepared by de-RF plasma enhanced chemical vapor deposition. The films are charactered by Raman spectra. The intrinsic stress is measured by optical interferometry. The strss relief patterns are analysised by optical microscopy. The well-known sinusoied type, flower type, branching type and straight line type pattern are observed. Two new stress relief pattem are noted in the present study. They are clock type and bubble type. These patterns are good agreement with the analysis of plate buckling theory. |
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| Keywords: | Diamond like carbon Coating Internal stress Buckling |
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