| 硬质合金刀片上微波等离子沉积(类)金刚石薄膜结构 |
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| 引用本文： | 郑昌琼,江建明,冉均国,涂铭旌.硬质合金刀片上微波等离子沉积(类)金刚石薄膜结构[J].四川大学学报(工程科学版),1991(1). |
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| 作者姓名： | 郑昌琼 江建明 冉均国 涂铭旌 |
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| 作者单位： | 成都科技大学高新技术研究院，成都科技大学高新技术研究院，成都科技大学高新技术研究院，成都科技大学高新技术研究院 |
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| 摘 要： | 本文报导采用最新的微波等离子体技术在硬质合金刀具上沉积的碳膜的结构.经扫描电镜、拉曼光谱、X射线衍射和光电子能谱分析,确定此沉积膜为类金刚石薄膜,其结构既不同于具有完整空间排列规律的金刚石结构,也不同于空间排列无层次的无定形碳膜结构,而是介于二者之间. 扫描电镜观察还表明,沉积膜与基体附着性和耐磨性能良好。
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| 关 键 词： | 硬质合金 微波等离子体化学气相沉积 类金刚石薄膜 结构 |
Structure of Diamond-Like Films Deposited on Carbide Tools by Microwave Plasma CVD |
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| Ran Junguo,Zheng Changqiong,Jiang Jianming and Tu Mingjing.Structure of Diamond-Like Films Deposited on Carbide Tools by Microwave Plasma CVD[J].Journal of Sichuan University (Engineering Science Edition),1991(1). |
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| Authors: | Ran Junguo Zheng Changqiong Jiang Jianming and Tu Mingjing |
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| Abstract: | The structure of the carbon films deposited on carbide tools by the microwave plasma chemical vapor deposition, which is an advanced technique, is reported in this paper. the structure of deposited films hase been studied by using SEM. Raman specstroscopy. X-ray diffraction and ESCA, It is determined that the deposited films are diamond-like films. The structure of the deposited films is neither the same structure as diamond films, which have the perfect spatial arrangement, nor the same as amorphous carbon films, which have non-perfect spatial arrangement. In addition, SEM analysises show that the deposited films adhere tightly to the surface of carbide tools, and they have high wear resistance too. |
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| Keywords: | carbide tools microwave plasma CVD daimond like film structure |
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