Integrated visual nanometric three-dimensional positioning and inspection in the automated assembly of AFM probe arrays |
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Authors: | M Lanzetta |
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Affiliation: | a Department of Mechanical, Nuclear and Production Engineering, University of Pisa, Italy b Laboratory of Manufacturing and Productivity, Massachusetts Institute of Technology, USA |
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Abstract: | This paper presents the design of a monocular three-dimensional artificial vision system attached to a 20× microscope lens for precision and microsystems applications. Possible uses in assembly include: positioner calibration, sensor-based part handling, positioning, and inspection in the nanometric range. The developed image acquisition method - along one direction (in steps of 100 nm), the depth-from-focus algorithm and subpixel interpolation (of 5 acquisitions for concurrent localization and inspection), allow to overcome the physical optics limitation achieving a resolution under 200 nm. The vision strategy and algorithms, described in the paper, have been validated by handling an AFM probe array by a micropositioner. |
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Keywords: | Assembly Visual inspection Localization |
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