| 微机械微波/射频开关的制备和功能测量研究 |
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| 引用本文： | 茅惠兵,忻佩胜,胡梅丽,赖宗声. 微机械微波/射频开关的制备和功能测量研究[J]. 半导体技术, 2002, 27(11): 11-14. DOI: 10.3969/j.issn.1003-353X.2002.11.004 |
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| 作者姓名： | 茅惠兵 忻佩胜 胡梅丽 赖宗声 |
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| 作者单位： | 华东师范大学电子科学技术系,上海,200062 |
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| 基金项目： | 上海市AM基金;9810; |
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| 摘 要： | 讨论了微机械微波/射频开关的原理、制备工艺和功能测试.微机械接触式微波/射频开关的基本结构是微波共平面波导,在制备工艺中首先考虑的是工艺兼容性,为此选择以PECVD生长的氮化硅为悬臂梁,聚酰亚胺为牺牲层.功能测试表明,该工艺制备的微机械开关的执行电压只有25V,优于同类微机械开关的指标,同时它具有良好的响应特性.
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| 关 键 词： | 微机械 微波/射频开关 悬臂梁 共平面波导 |
| 文章编号： | 1003-353X(2002)11-0011-04 |
| 修稿时间： | 2002-03-08 |
Fabrication and function test of the micromechanical MW/RF switches |
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| MAO Hui-bing,XIN Pei-sheng,HU Mei-li,LAI Zong-sheng. Fabrication and function test of the micromechanical MW/RF switches[J]. Semiconductor Technology, 2002, 27(11): 11-14. DOI: 10.3969/j.issn.1003-353X.2002.11.004 |
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| Authors: | MAO Hui-bing XIN Pei-sheng HU Mei-li LAI Zong-sheng |
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| Abstract: | The principle, fabrication processes and function test of the micromechanical MW/RF switches are presented. The fundamental structure of the switches is a coplanar waveguide. Thefabrication compatibility must be considered in the fabrication processes. Consequently, the siliconnitride deposited by PECVD is chosen as the support cantilever materials and the polyimide as asacrificial film. The Function test shows that the driving voltage of the switches is only 25V, whichis less than the driving voltage of switches of fabricated by other groups. Meanwhile, the switcheshave a good response character. |
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| Keywords: | MEMS MW/RF switches cantilever coplanar wave guide |
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