线源金属原子蒸气发生装置的研制

介绍了一套线源金属原子蒸气发生装置。该装置由以下几部分组成 :不锈钢真空蒸发腔体 ;真空获得系统 ;电子枪 ;坩埚 ;能产生均匀磁场的磁极及线圈 ;推拉式内置工作平台 ;循环水冷却系统 ;电源、测量仪器及控制电路。经安装、调试和试运行试验 ,性能良好 ,已达到原设计指标。真空度达到 3× 10 - 3Pa ,对钆金属材料 ,能产生熔池的表面面积为 2 2mm× 4mm。利用此装置可开展电子枪蒸发、离子引出等多项实验研究。

Manufacture and Research of the Linear-source Metal Atom Evaporation Device

This paper reported a set of metal atom evaporation device of linear source. The device is composed of the following parts: stainless steel vacuum evaporation cavity, vacuum attaining system, electron gun, crucible, uniform magnetic field, push and pull inner worktable, water cooling system, power supply, measure instrument and control circuit. The device has achieved its primary design targets by several test runs after installing and debugging. The vacuum degree is above 3×10 -3 Pa. The superficial melt area reaches to 22 mm×4 mm to gadolinium metallic material. Many experiments such as the evaporation by the electron gun, ions extraction can be carried out with this device.