工模具的PAMOCVD涂层研究

用传统的ＴｉＣｌ４－Ｈ２－Ｎ２进行了ＰＣＶＤＴｉＮ处理，存在炉体和真空系统腐蚀及氯元素进入涂层等问题，作者采用金属有机物ＴＰＴ（Ｃ３Ｈ７Ｏ）４Ｔｉ）或ＴＥＴ（Ｃ２Ｈ５Ｏ）４Ｔｉ）代替ＴｉＣｌ４作为供钛源进行ＰＡＭＯＣＶＤ处理，研究了不同工艺参数对涂层性能的影响，试验表明，Ｈ１３铝型材挤压模及标准件冲头等采用ＰＡＭＯＣＶＤ处理后寿命可提高１－２倍，并解决了设备被腐蚀的问题。

Study on the PAMOCVD Coatings of Die and Tool Steels

To reduce the corrosion on the furnace body and the vacuum system due to conventional PCVD TiN process by means of TiCl4-H2-N2 which causes chlorine diffused into the coatings. The authors make use of organometallic compound TPT [C3H7O)4Ti] or TET [(C2H5O)4Ti] instead of TiCl, as the Ti source in PAMOCVD (plasma-assisted metalorganic CVD) process. The influence of various technological parameters on the performance of the coatings are studied. Comparison of die, drill bit and fastener treated by PAMOCVD with those by PCVD TiN coating indicates that their service life are prolonged by 1~2 times. And the Corrosion of equipment is also prevented.