The potential of porous silicon gas sensors |
| |
| Authors: | Serdar Ozdemir James L. Gole |
| |
| Affiliation: | aSchool of Physics, Georgia Institute of Technology, Atlanta, GA 30332, United States;bSchool of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States |
| |
| Abstract: | Recent developments in porous silicon gas sensors have been reviewed. Monitored species detection levels, and the mechanisms of sensing for different sensor designs are also discussed. Porous silicon surface modification methods have been employed for detecting different gas molecules; H2O, ethanol, methanol, isopropanol, COx, NOx, NH3, O2, H2, HCl, SO2, H2S and PH3. |
| |
| Keywords: | Porous silicon Gas sensor Nanostructure modification Photoluminescence |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
