Effects of B/C ratio on the structural and mechanical properties of TiBCN coating deposited by PACVD |
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| Affiliation: | 1. Dept. of Materials Science, INSTM, University of Milano-Bicocca, Via R. Cozzi, 55, 20125, Milano, Italy;2. Istituto di Fotonica e Nanotecnologie-CNR, via alla Cascata, 56/C, 38100, Povo, Trento, Italy;1. Institute of Physics and Technology, Mongolian Academy of Sciences, Ulaanbaatar, 13330, Mongolia;2. Queensland Micro- and Nanotechnology Centre, Griffith University, Nathan, Queensland, 4111, Australia;1. School of Materials Science and Engineering, Shanghai University, Shanghai, China;2. National Key Laboratory of Science and Technology on Underwater Acoustic Antagonizing, Shanghai, 201108, China;3. Shanghai Marine Electronic Equipment Research Institute, Shanghai, 201108, China;1. Department of Physics, Zhejiang Normal University, Jinhua, 321004, China;2. MOE Key Laboratory of Macromolecular Synthesis and Functionalization, Department of Polymer Science and Engineering, Zhejiang University, Hangzhou, 310027, China;3. College of Environment, Hohai University, Nanjing, 210098, China |
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| Abstract: | TiBCN coating is known as a hard, self-lubricant and wear resistant coating which can be applied on industrial tools to increase their working life time under severe wear conditions. In this paper, TiBCN coatings with different B/C ratios were applied on H13 steel using plasma-assisted chemical vapor deposition from BBr3, TiCl4, CH4, N2 and H2 reactants at 500 °C. The results signified that the introduction of B and C elements to TiN changed its preferred crystalline orientation from (200) to (111) and decreased crystal size from 12 to 9 nm as a result of the formation of amorphous phases which constrain grain growth. The addition of B and C altered the coating's nucleation and growth mechanisms and generated a strong surface etching agent of HBr which significantly changed surface morphology and roughness. Increasing flow ratio of CH4 to BBr3 from 0.125 to 0.25 influenced the coating's mechanical properties and increased coating's hardness from 18.1 to 23.2 GPa and Young's modulus from 296 to 334.7 GPa. Rising coating's C content remarkably improved its nano-wear resistance and the coating with the highest C content exhibited a wear volume of 1*10?19 m3 which was about 63% lower than that of TiN coating. |
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| Keywords: | Thin films Nano-indentation PACVD Young's modulus Wear-resistance |
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