Fabrication and characterization of a tiny PZT thick-film longitudinal-bending coupled drive vibrator using electrohydrodynamic jet printing |
| |
| Affiliation: | 1. Saint-Petersburg State Institute of Technology, Saint Petersburg, 190013, Russian Federation;2. Ioffe Institute, Saint Petersburg, 194021, Russian Federation;1. College of Electronic Information and Optical Engineering, Nankai University, Tianjin, 300350, China;2. Key Laboratory of Photoelectronic Thin Film Devices and Technology of Tianjin, Tianjin, 300350, China;3. School of Physics, Nankai University, Tianjin, 300350, China;4. School of Opto-electronic Information, University of Electronic Science and Technology, Chengdu, 610054, China;5. Engineering Research Center of Thin Film Optoelectronics Technology, Ministry of Education, Nankai University, Tianjin, 300350, China;1. School of Electronics and Information Engineering, Guiyang University, Guiyang, 550005, Guizhou, China;2. Key Laboratory of Functional Composite Materials of Guizhou Province, College of Big Data and Information Engineering, Guizhou University, Guiyang, 550025, Guizhou, China;3. College of Computer and Information Engineering, Guizhou University of Commerce, Guiyang, 550014, Guizhou, China;1. College of Mechanical and Electrical Engineering, Central South University of Forestry and Technology, Changsha, Hunan, 410004, China;2. School of Materials Science and Engineering, Central South University, Changsha, Hunan, 410083, China;1. Department of Orthopedics, Guangdong Provincial People''s Hospital, Guangdong Academy of Medical Sciences, Guangzhou, Guangdong, 510080, PR China;2. School of Materials Science and Engineering, South China University of Technology, Guangzhou, 510641, PR China;3. National Engineering Research Center for Tissue Restoration and Reconstruction, Guangzhou, 510006, PR China |
| |
| Abstract: | This paper describes a fabrication method of a novel type of micro piezoelectric thick-film longitudinal-bending coupled (LBC) vibrator with a length of 8 mm and thickness of 0.34 mm using electrohydrodynamic jet (E-jet) printing. The LBC micro-vibrator was designed, and a frequency sensitivity analysis of the structural parameters was implemented. When the thickness of the lead zirconate titanate (PZT) thick-film element of the vibrator reached 76 μm, tuning of the composite-mode frequency consistency could be achieved. The micro-vibrator was then fabricated by depositing the PZT thick film directly on the surface of the elastic body using E-jet printing, and the film thickness was flexibly adjusted by tuning the number of prints, thus avoiding the problems of insufficient PZT thin film thickness (≤1 μm) and excessive bulk PZT ceramic volume. Micro-morphological observations showed that the printed thick film was dense and smooth, with a thickness of approximately 76 μm. Furthermore, the vibration mode frequency of the vibrator differed from the test resonant frequencies by only 0.92%, and the vibrator could achieve driving motion with a volume and an excitation voltage approximately one-tenth of that of a bulk piezoelectric motor. Moreover, the unit power density was 0.36 W kg?1 V?1, which is 1.6 times higher than that of a large bulk piezoelectric motor, indicating that the vibrator has good potential for small-space and low-voltage applications. |
| |
| Keywords: | PZT thick-film Longitudinal-bending coupled Micro-vibrator Electrohydrodynamic jet printing Power density |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
