高钴硬质合金基底化学气相沉积金刚石膜的研究

通过采用二步浸蚀法对硬质合金(WC-12%Co)刀具进行预处理,应用微波等离子化学气相沉积装置,在经二步浸蚀法预处理过的硬质合金上沉积出高质量和结合力强的金刚石涂层.研究了提高涂层附着力的基体预处理方法,用SEM、XRD、激光Raman光谱分析了涂层质量,用切削试验检测金刚石涂层与刀具基底的附着情况,结果表明二步浸蚀基体预处理方法能有效地降低基体表面金属钴的含量,消除沉积过程中Co的负面影响,从而提高金刚石涂层的附着力,使刀具使用寿命明显提高.

Study on CVD Diamond Coating on Cemented Carbide Substrate with High Content of Cobalt

The diamond coating with high quality and good adhesion was obtained by a MPCVD method on the WC-12%Co substrate which was pretreated by a two-steps method.The diamond coating was analyzed with SEM?XRD and laser Raman's spectrometer ,the adhesion of diamond coating was measured by cutting test. The results show the quality of diamond coating was improved and the tool's life was pro longed by using the two-steps method of pretreatment which can effectively decrease the content of Cobalt on the substrate's surface and control the side effect of Cobalt .