The Design and Characteristics of a 630-mm Phase-Shifting Interferometer |
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| Authors: | D E Silin I E Kozhevatov E H Kulikova A V Pigasin S B Speransky S A Bel’kov I N Derkach D I Lobachev I E Chernov |
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| Affiliation: | 1.Federal Research Center, Institute of Applied Physics,Russian Academy of Sciences,Nizhny Novgorod,Russia;2.Russian Federal Nuclear Center,All-Russia Research Institute of Experimental Physics,Sarov,Russia |
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| Abstract: | A large-aperture Fizeau interferometer has been developed for measuring the characteristics of optical elements with flat surfaces. The interferometer has two fields of view with dimensions of 630 and 100 mm and with transverse resolutions of 0.63 and 0.1 mm/pixel, respectively. Due to the calibration of the reference plates, the absolute measurement accuracy of the interferometer is λ/1000 RMS (λ = 632.8 nm) on a 630-mm field of view. |
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