| 一种设计真空紫外高反膜的新方法 |
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| 引用本文： | 刘兴悦,戴佳鑫,干蜀毅. 一种设计真空紫外高反膜的新方法[J]. 光学仪器, 2010, 32(5): 84-88. DOI: 10.3969/j.issn.1005-5630.2010.05.018 |
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| 作者姓名： | 刘兴悦 戴佳鑫 干蜀毅 |
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| 作者单位： | 合肥工业大学机械与汽车工程学院,安徽合肥230009 |
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| 摘 要： | 在真空紫外强吸收波段采用"逐层"(LBL)设计法。通过阐述"逐层"设计的理论基础和膜材选择的基本原则,运用MatLab软件,用解析加复平面作图法设计了对应于50～200nm波段的高反膜系。以熔融石英基底上硅、碳组成的膜系为例,用这种设计方法获得的平均反射率最高可达64%。对比常规周期多层膜,这种设计法可以明显地提高强吸收波段的反射率。
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| 关 键 词： | 真空紫外 高反膜 膜系设计 反射率 |
A new design method for high-reflection vacuum ultraviolet films |
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| LIU Xingyue,DAI Jiaxin,GAN Shuyi. A new design method for high-reflection vacuum ultraviolet films[J]. Optical Instruments, 2010, 32(5): 84-88. DOI: 10.3969/j.issn.1005-5630.2010.05.018 |
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| Authors: | LIU Xingyue DAI Jiaxin GAN Shuyi |
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| Affiliation: | (Department of Mechanical and Automobile Engineering, Hefei University of Technology, Hefei 230009, China) |
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| Abstract: | Layer-by-layer （LBL） design method is used in the vacuum ultraviolet （VUV） spectral region. The theoretical basis of LBL design method and the basic principle for the selection of a proper pair of materials are presented. The high reflective multilayers at wavelength between 50-200nm are designed with the aid of analysis method and graphic representation in Gaussian plane by use of software MatLab. The reflectance of designed multilayers with Si and C on a fused silica substrate can reach as high as 64%. Comparing with conventional quarter-wavelength design method, the reflectance can be significantly enhanced by using this method in given spectral region, especially when strong absorbing material is used. |
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| Keywords: | vacuum ultraviolet high-reflection films coating-design reflectance |
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