| 微型氢气传感器的结构设计与仿真分析 |
| |
| 引用本文： | 徐仁庆,殷晨波,何茂先.微型氢气传感器的结构设计与仿真分析[J].传感器与微系统,2008,27(11). |
| |
| 作者姓名： | 徐仁庆 殷晨波 何茂先 |
| |
| 作者单位： | 南京工业大学车辆与工程机械研究所,江苏,南京,210009 |
| |
| 摘 要： | 基于金属氧化物半导体气体传感器的工作机理,提出了一种微型氢气传感器结构设计。针对几个主要设计参数,利用有限元分析软件ANSYS对这种结构进行了热分析。通过分析和比较,完成了对微型氢气传感器结构的优化设计,并对优化后的传感器进行了瞬态分析。分析结果表明:所设计的传感器结构符合设计要求。
|
| 关 键 词： | 微型氢气传感器 结构设计 热分析 |
Design and simulation of structure of micro hydrogen sensor |
| |
| XU Ren-qing,YIN Chen-bo,HE Mao-xian.Design and simulation of structure of micro hydrogen sensor[J].Transducer and Microsystem Technology,2008,27(11). |
| |
| Authors: | XU Ren-qing YIN Chen-bo HE Mao-xian |
| |
| Abstract: | Based on the operational mechanism of the metal oxide semiconductor gas sensor,a new kind of structure design of micro hydrogen sensor is presented.Aiming at several important design parameters,the structure is simulated with thermal analysis by the finite element analysis software ANSYS.The optimization result of structure design of micro hydrogen sensor is obtained by analyzing and comparing.The optimized sensor is simulated with transient analysis.The result indicates the structure can meet the design requirement. |
| |
| Keywords: | micro hydrogen sensor structure design thermal analysis |
| 本文献已被 维普 万方数据 等数据库收录！ |
|
