| 声表面波气体传感器设计与制作 |
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| 引用本文： | 赵以贵,李维龙,张森. 声表面波气体传感器设计与制作[J]. 传感器与微系统, 2014, 0(8): 80-82 |
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| 作者姓名： | 赵以贵 李维龙 张森 |
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| 作者单位： | 华东电子工程研究所,安徽合肥230088 |
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| 摘 要： | 阐述了声表面波(SAW)甲基膦酸二甲酯(DMMP)气体传感器的设计和制作过程。为提高探测灵敏度和选择性,主要考虑了SAW振荡器的频率稳定性,敏感材料巯基十一酸(MUA)采用了分子自组装成膜方式和Cu2+化学修饰。实验结果显示:在1~100mg/m3的浓度范围内具有好的线性度和21Hz/mg/cm3的灵敏度。
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| 关 键 词： | 声表面波 气体传感器 甲基膦酸二甲酯 巯基十一酸 |
Design and fabrication of SAW gas sensor |
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| ZHAO Yi-gui,LI Wei-long,ZHANG Sen. Design and fabrication of SAW gas sensor[J]. Transducer and Microsystem Technology, 2014, 0(8): 80-82 |
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| Authors: | ZHAO Yi-gui LI Wei-long ZHANG Sen |
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| Affiliation: | ( East China Research Institute of Electronic Engineering, Hefei 230088, China) |
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| Abstract: | Design and fabrication process of surface acoustic wave （SAW） gas sensor for dimethyl-methyl- phosphonate （DMMP） detection is presented . To improve detection sensitivity and selectivity, frequency stability of SAW oscillator is considered carefully, and the 11-mercaptoundecanoic acid （MUA） adopts molecule self- assembled technology and chenically modified by Cu2＋. Experimental result shows good linearity and the superior sensitivity of 21 Hz/mg/cm3 at concentration range of i -100 mg/m3. |
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| Keywords: | surface acoustic wave（SAW） gas sensor DMMP MUA |
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