Effects of a-Si:H resist vacuum-lithography processing on HgCdTe |
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Authors: | R N Jacobs E W Robinson M Jaime-Vasquez A J Stoltz J Markunas L A Almeida P R Boyd J H Dinan L Salamanca-Riba |
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Affiliation: | (1) U.S. Army RDECOM CERDEC, Night Vision and Electronic Sensors Directorate, Fort Belvoir, VA;(2) U.S. Army Research Laboratory, Adelphi, MD;(3) Department of Materials Science & Engineering, University of Maryland, College Park, MD |
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Abstract: | A vacuum-compatible process for carrying out lithography on Hg1−xCdxTe and CdTe films was previously demonstrated. It was shown that hydrogenated amorphous silicon (a-Si:H) could be used as
a dry resist by projecting a pattern onto its surface using excimer laser irradiation and then developing that pattern by
hydrogen plasma etching. Pattern transfer to an underlying Hg1−xCdxTe film was then carried out via Ar/H2 plasma etching in an electron cyclotron resonance (ECR) reactor. Despite the successful demonstration of pattern transfer,
the possibility of inducing harmful effects in the Hg1−xCdxTe film due to this vacuum lithography procedure had not been explored. Here we present structural and surface compositional
analyses of Hg1−xCdxTe films at key stages of the a-Si:H vacuum lithography procedure. X-ray diffraction double crystal rocking curves taken before
and after a-Si:H deposition and after development etching were identical, indicating that bulk structural changes in the Hg1−xCdxTe film are not induced by these processes. Cross-section transmission electron microscopy studies show that laser-induced
heating in the 350 nm thick a-Si:H overlayer is not sufficient to cause structural damage in the underlying Hg1−xCdxTe surface. In vacuo surface analysis via Auger electron spectroscopy and ion scattering spectroscopy suggest that the hydrogen
plasma development process produces Hg-deficient surfaces but does not introduce C contamination. However, after ECR plasma
etching into the Hg1−xCdxTe film, the measured x value is much closer to that of the bulk. |
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Keywords: | a-Si:H dry etching photolithography HgCdTe CdTe plasma-enhanced chemical-vapor deposition (PECVD) vacuum-compatible processing |
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