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相移阴影莫尔轮廓术的相位去包裹处理新技术
引用本文:王昭,赵宏.相移阴影莫尔轮廓术的相位去包裹处理新技术[J].半导体光电,1998,19(5):347-350.
作者姓名:王昭  赵宏
作者单位:西安交通大学
摘    要:文章将相移方法引入传统的阴影莫尔轮廓术中,通过三步相移法得到三维物体的相位分布图。并半原来提出的变精度二次测量相位去包裹方法引种为更一般、更实用的方法,首次利用改变光源位置实现变精度测量。

关 键 词:莫尔轮廓术  相移  相位去包裹  光栅  光学测量

New phase-unwrapping method in phase-shifting shadow Moire profilometry
WANG Zhao ZHAO Hong TAN Yushan.New phase-unwrapping method in phase-shifting shadow Moire profilometry[J].Semiconductor Optoelectronics,1998,19(5):347-350.
Authors:WANG Zhao ZHAO Hong TAN Yushan
Abstract:The method of phase-shifting is introduced in traditional Moire profilometry.The phase pattern of three dimensional object is obtained by three step phase-shifting.The former dual-measurement-phase-unwrapping method using different precision has been turned into an easier and more practical one,and for the first time,the dual-measurement of different precision has been realized by changing the positions of the light sources.
Keywords:Moire Profilometry  Phase-shifting  Phase-unwrapping
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