Phase transformation of diamond-like carbon/silver composite films by sputtering deposition |
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| Authors: | Shyuan-Yow Chen Keng-Liang Ou Wei-Chen Huang Kuo-Tien Chu Shih-Fu Ou |
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| Affiliation: | 1. Department of Dentistry, Cathay General Hospital, Sijhih, Taipei 221, Taiwan;2. Department of Dentistry, Cathy General Hospital, Taipei 106, Taiwan;3. Department of Dentistry, College of Oral Medicine, Taipei Medical University;4. Research Center for Biomedical Devices and Prototyping Production, Taipei Medical University, Taipei 110, Taiwan;5. Research Center for Biomedical Implants and Microsurgery Devices, Taipei Medical University, Taipei 110, Taiwan;6. Graduate Institute of Biomedical Materials and Tissue Engineering, Taipei Medical University, Taipei 110, Taiwan;g Division of ProsthodontDivision of Prosthodontics, Department of Dentistry, Taipei Medical University Hospital;h Institute of Mold & Die Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, 807, Taiwan |
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| Abstract: | This study fabricated hydrogenated diamond-like carbon/silver bioceramic films on glass substrates using radio frequency magnetron sputtering with a single silver target in an atmosphere of Ar/CH4 mixture. The effects of applied power on the composition and microstructure of bioceramic film were evaluated. A phase transformation, amorphous diamond-like carbon → nano-silver precipitation → nano-silver growth in the amorphous diamond-like carbon matrix was observed during sputtering. The film growth rate, surface roughness, silver content and size of silver nanoclusters in the films all increased with the silver target power due to the higher flux of sputtered silver species toward the substrate. |
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| Keywords: | B. Nanocomposites Silver-containing diamond-like carbon Sputtering |
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