| 声光可调谐滤波器中声波导的制作及性能测试 |
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| 引用本文： | 杨薇,刘迎,肖立峰,潘建旋. 声光可调谐滤波器中声波导的制作及性能测试[J]. 红外与激光工程, 2009, 38(5) |
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| 作者姓名： | 杨薇 刘迎 肖立峰 潘建旋 |
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| 作者单位： | 天津大学,理学院,物理系,光电信息技术科学教育部重点实验室,天津,300072;天津津航技术物理研究所,天津,300192 |
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| 基金项目： | 国家自然科学基金资助项目(60478036) |
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| 摘 要： | 以LiNbO3晶体为基底,SiO2/In2O3为镀膜材料,设计并制作了用于准共线型声光可调谐滤波器(AOTF)的声波导及其叉指换能器(IDT),研究了制作工艺,实验测量了该声波导的传输性能。实验结果表明:在未加声吸收胶的声波导中,声表面波(SAW)来回反射,形成驻波,使能量叠加,影响了传输;而在加了声吸收胶的声波导中,SAW具有良好的传输特性,即射频频率在165~185MHz时,声波导传输的效率达到最高,符合AOTF滤波的中心频率范围。测试结果表明:该声波导能够满足声光滤波的要求,而且制作工艺简单、设计灵活,性能更高。
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| 关 键 词： | 声表面波 声波导 叉指换能器 声光可调谐滤波器 |
Fabrication and performance measurement of acoustical waveguide in acousto-optic tunable filter |
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| YANG Wei,LIU Ying,XIAO Li-feng,PAN Jian-xuan. Fabrication and performance measurement of acoustical waveguide in acousto-optic tunable filter[J]. Infrared and Laser Engineering, 2009, 38(5) |
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| Authors: | YANG Wei LIU Ying XIAO Li-feng PAN Jian-xuan |
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| Affiliation: | 1.Key Laboratory of Opto-electronics Information Technical Science;Ministry of Education;Department of Physics;College of Science;Tianjin University;Tianjin 300072;China;2.Institute of Tianjin Jinhang Technology Physics;Tianjin 300192;China |
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| Abstract: | The design and fabrication of acoustical waveguide and interdigital transducer (IDT) in the quasi-collinear acousto-optic tunable filter (AOTF) was investigated experimentally by using SiO2/In2O3 film on LiNbO3 substrate. Its transmission performance was measured. The results show that the surface acoustic wave (SAW) in the acoustical waveguide without acoustical absorber was reflected back and forth, and then the standing wave was formed resulting in energy superposition, transmission performance was affec... |
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| Keywords: | SAW Acoustical waveguide IDT AOTF |
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