| 基于自抗扰控制器的6-DOF磁悬浮平台悬浮高度控制 |
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| 引用本文： | 刘德君,曲永印,白晶.基于自抗扰控制器的6-DOF磁悬浮平台悬浮高度控制[J].微细加工技术,2008(3). |
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| 作者姓名： | 刘德君 曲永印 白晶 |
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| 作者单位： | 北华大学,电气工程学院,吉林省,吉林市,132021 |
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| 摘 要： | 介绍一种应用于半导体光刻、微型装配、纳米技术等领域的新型磁悬浮平台.针对该平台的悬浮部分是一个具有参数摄动、输入耦合的复杂系统,采用自抗扰控制器的控制方法,实现对内部扰动和外部扰动的补偿.仿真结果表明,这种控制方案有较好的动态、静态特性及鲁棒性.
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| 关 键 词： | 6-DOF磁悬浮平台 参数摄动 自抗扰 扩张状态观测器 |
Altitude Control of 6-DOF Planar Magnetic Suspension Stage Based on Auto-disturbance Rejection Controller |
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| LIU De-jun,QU Yong-yin,BAI Jing.Altitude Control of 6-DOF Planar Magnetic Suspension Stage Based on Auto-disturbance Rejection Controller[J].Microfabrication Technology,2008(3). |
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| Authors: | LIU De-jun QU Yong-yin BAI Jing |
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| Affiliation: | LIU De-jun,QU Yong-yin,BAI Jing(Electric Engineering College of Beihua University,Jilin 132021,China) |
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| Abstract: | A novel planar magnetic suspension stage has been presented,the Planar magnetic suspension stage was one micro-electromechanical apparatus,which was widely used in semi-conductor processing,circuit board manufacturing,micro-assembling system,and so on.Aiming at the multi-input and parameter perturbation system of suspension,the inner disturbance and outside disturbance can be observed with the auto-disturbance rejection controller(ADRC),and use it to offset the system.The result of simulation indicats that ... |
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| Keywords: | 6-DOF planar magnetic suspension stage parameter perturbation auto-disturbance rejection controller(ADRC) extended state |
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