用于液体介质中局放声测的非本征光纤法珀传感器

用膜片与光纤尾纤端面构成非本征光纤法珀传感器，测量液体介质中局部放电产生的声波，所组成系统具有全介质结构和抗电磁干扰能力。采用尾纤分别与石英膜和微电子机械系统(micro electronic mechanical systems，MEMS)工艺获得硅膜制成传感器，根据理论分析和计算机仿真结果建立确定传感器参数的方法。应用压电超声传感器与两种膜片的光纤传感器共同测量局放产生的声发射信号。实验结果表明，硅膜结构的非本征光纤法珀传感器最小可测放电量达到了150 pC，实验同时验证了法珀腔长工作点对测量灵敏度的影响。

Extrinsic Fiber Fabry-Perot Sensors for PD-induced Acoustic Emission Detection in Liquid Dielectrics

Extrinsic fiber Fabry-Perot (FP) sensor with diaphragm and fiber pigtail end was designed for detecting PD-induced acoustic emission in liquid dielectrics. The system has all-dielectric structure and inherent immunity to electromagnetic interference. The FP sensors consisted of fiber pigtail end and quartz diaphragm or MEMS(micro electronic mechanical systems) silicon diaphragm. The parameters of sensors were determined according to theory and simulation. PD-induced acoustic signals were detected by FP and piezoelectric (PZT) sensors respectively. The experimental results show that discharge level of 150 pC could be measured by FP sensor with silicon diaphragm. It also shows that operating-point of FP sensor affected its sensitivity.