Nano positioning control for dual stage using minimum order observer |
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Authors: | Kim Hong Gun |
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Affiliation: | 1.Department of Mechanical and Automotive Engineering, Jeonju University, Jeonju, 560 - 759, Korea ; |
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Abstract: | A nano positioning control is developed using the ultra-precision positioning apparatus such as actuator, sensor, guide, power
transmission element with an appropriate control method. Using established procedures, a single plane X-Y stage with ultra-precision
positioning is manufactured. A global stage for materialization with robust system is combined by using an AC servo motor
with a ball screw and rolling guide. An ultra-precision positioning system is developed using a micro stage with an elastic
hinge and piezo element. Global and micro servos for positioning with nanometer accuracy are controlled simultaneously using
an incremental encoder and a laser interferometer to measure displacement. Using established procedures, an ultra-precision
positioning system (100 mm stroke and ±10 nm positioning accuracy) with a single plane X-Y stage is fabricated. Its performance
is evaluated through simulation using Matlab. After analyzing previous control algorithms and adapting modern control theory,
a dual servo algorithm is developed for a minimum order observer to secure the stability and priority on the controller. The
simulations and experiments on the ultra precision positioning and the stability of the ultra-precision positioning system
with single plane X-Y stage and the priority of the control algorithm are secured by using Matlab with Simulink and ControlDesk
made in dSPACE. |
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Keywords: | |
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