| Abstract: | A chemical cleaving method to improve the resolution of relief modulation in dichromated gelatin is presented. The process (which uses hydroxylamine) yields higher relief resolution and better profile fidelity than a process that uses the enzyme trypsin because it has many fewer cleaving sites. Experiments prove that relief modulation can produce a resolution of as much as 500 lines/mm. With a projection exposure system, a microprism array with a 30-mum-wide, 0.8-mum-high cell is fabricated by this method. A method for forming a continuous relief on dichromated gelatin is also discussed. |
